Business · Companies · 1 day ago

SMEE Displays Model of Shared i-Line and KrF Lithography Platform

SMEE Displays Model of Shared i-Line and KrF Lithography Platform

Chinese equipment maker SMEE displayed a lithography platform model at CIIE.

The model showed a shared platform for i-line and KrF lithography, two types of technology used to make semiconductor chips.

SMEE said equipment already operating on production lines had processed more than 10 million wafers.

A wafer is a thin slice of material on which many chips are made.

The figure shows the scale of use SMEE says its production equipment has reached.

The display was a model, and no further plans or timeline for the platform were given.

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